Product details

FK100V

Grippers & End Effectors

SRT

FK100V

About this product

FK100V is a vacuum wafer-handling end effector for semiconductor robots. Its public specification supports non-warped 4–12-inch wafers with multipoint contact, an anti-static Teflon contact surface and wafer-presence detection. Alumina ceramic, high-hardness aluminum alloy and carbon-fiber composite are listed material choices; custom configurations require confirmation. The printed supply-air pressure is ≤−70 kPa, with reference and test point unspecified. The exact-page manufacturer reference illustration is preserved. Cover image: Manufacturer reference illustration.

Model
FK100V
Category
Grippers & End Effectors, Components

Specifications & evidence

Source-backed claims. Configuration, workload and evidence type matter when comparing products.

Contact-surface material

Anti-static Teflon

Manufacturer specification

Configuration: FK100V; exact-model public parameter table; Public exact-model manufacturer table; material/custom options are not additional physical model identities.

FK100V北京软体机器人科技股份有限公司-SRT软体机器人,软体灵巧手,行业解决方案
接触面材质 | Anti-static Teflon

Customization

Supported

Manufacturer specification

Configuration: FK100V; exact-model public parameter table; Public exact-model manufacturer table; material/custom options are not additional physical model identities.

FK100V北京软体机器人科技股份有限公司-SRT软体机器人,软体灵巧手,行业解决方案
非标订制 | 支持

Material options

Alumina ceramic; high-hardness aluminum alloy; carbon-fiber composite; customization

Manufacturer specification

Configuration: FK100V; exact-model public parameter table; Public exact-model manufacturer table; material/custom options are not additional physical model identities.

FK100V北京软体机器人科技股份有限公司-SRT软体机器人,软体灵巧手,行业解决方案
材质 | 氧化铝陶瓷、高硬度合金铝、碳钎维等 ( 支持材质订制 )

Supply-air pressure

≤−70 kPa

Manufacturer specification

Configuration: FK100V; exact-model public parameter table; Printed negative-pressure limit retained. Gauge/absolute reference and measurement point are not defined.

FK100V北京软体机器人科技股份有限公司-SRT软体机器人,软体灵巧手,行业解决方案
供气压力 | ≤ -70Kpa

Supported wafer size

4–12; custom sizes supported inch

Manufacturer specification

Configuration: FK100V; exact-model public parameter table; Public exact-model manufacturer table; material/custom options are not additional physical model identities.

FK100V北京软体机器人科技股份有限公司-SRT软体机器人,软体灵巧手,行业解决方案
晶圆尺寸 | 4"~12" 可订制

Wafer contact method

Multipoint contact

Manufacturer specification

Configuration: FK100V; exact-model public parameter table; Public exact-model manufacturer table; material/custom options are not additional physical model identities.

FK100V北京软体机器人科技股份有限公司-SRT软体机器人,软体灵巧手,行业解决方案
晶圆接触等级 | 多点接触

Wafer pickup method

Vacuum adsorption

Manufacturer specification

Configuration: FK100V; exact-model public parameter table; Public exact-model manufacturer table; material/custom options are not additional physical model identities.

FK100V北京软体机器人科技股份有限公司-SRT软体机器人,软体灵巧手,行业解决方案
晶圆拾取方式 | 真空吸附

Wafer-presence detection

Supported

Manufacturer specification

Configuration: FK100V; exact-model public parameter table; Public exact-model manufacturer table; material/custom options are not additional physical model identities.

FK100V北京软体机器人科技股份有限公司-SRT软体机器人,软体灵巧手,行业解决方案
晶圆在位检测 | 支持

Wafer types

Non-warped wafers

Manufacturer specification

Configuration: FK100V; exact-model public parameter table; Public exact-model manufacturer table; material/custom options are not additional physical model identities.

FK100V北京软体机器人科技股份有限公司-SRT软体机器人,软体灵巧手,行业解决方案
适用晶圆类型 | 无翘曲各类型晶圆

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